Micro System Technologies 90 - 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10-13 September 1990
The trend of the future development is to increase the integration density by combining the microelectronic, microoptic, and micro mechanic aspects to new complex multifunctional systems, which are able to comprise sensors, actuators, analogue and digital circuits on the same chip or on multichip-modules.