Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope - Bog af Huiliang Cao - Hardback

This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding.It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the..