From MEMS to Bio-MEMS and Bio-NEMS - Manufacturing Techniques and Applications - Bok av Marc J. (University of California Madou - Inbunden
Details manufacturing techniques applicable to bio-nanotechnology. Reviewing MEMS techniques, materials, and modeling, this text covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. It discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices.